%0 Journal Article
%T Fabrication of robust electrothermal MEMS devices using aluminum–tungsten bimorphs and polyimide thermal isolation
%A Pal, Sagnik
%A Xie, Huikai
%J Journal of Micromechanics and Microengineering
%V 22
%N 11
%P 14
%@ 0960-1317
%D 2012-11-01
%~ DeepDyve