%0 Journal Article
%T Amorphous zinc-imidazolate all-dry resists
%A Waltz, Kayley E.
%A Eckhert, Patrick M.
%A Corkery, Peter
%A Ahmad, Mueed
%A Kraetz, Andrea
%A Miao, Yurun
%A Lee, Dennis T.
%A Abdel-Rahman, Mohammed K.
%A Lan, Yucheng
%A Haghi-Ashtiani, Paul
%A Stein, Aaron
%A Boscoboinik, J. Anibal
%A Tsapatsis, Michael
%A Fairbrother, D. Howard
%J Proceedings of SPIE
%V 12957
%P 129570H-129570H-7
%@ 0277-786X
%D 2024-04-09
%I SPIE
%~ DeepDyve