%0 Journal Article
%T Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA
%A Shukla, Rahul
%A Beera, Gowtham
%A Dubey, Ankit
%A Sharma, Varun P.
%A Sankar, P. Ram
%A Dhawan, Rajnish
%A Tiwari, Pragya
%A Sinha, A. K.
%J Journal of Micromanufacturing
%V 5
%N 2
%P 207-216
%@ 2516-5984
%D 2022-11-01
%I SAGE Publications
%~ DeepDyve