%0 Journal Article
%T Analysis of microlithography in an open-architecture TCAD system
%A Axelrad, Valery
%A Tochitsky, Eduard I.
%J Proceedings of SPIE
%V 2197
%N 1
%P 648-659
%@ 0277-786X
%D 1994-05-17
%I SPIE
%~ DeepDyve