%0 Journal Article
%T X‐ray lithography
%A Feder, R.
%A Spiller, E.
%A Topalian, J.
%J Polymer Engineering & Science
%V 17
%N 6
%P 385-389
%@ 0032-3888
%D 1977-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve