%0 Journal Article
%T Estimation of Centrifugal-Force Effect on Resist Coat around Wafer Edges
%A Shigeki Matsutani , Shigeki Matsutani 
%A Shigeyuki Uzawa 
 , Shigeyuki Uzawa
%J Japanese Journal of Applied Physics
%V 31
%N 4A
%@ 0021-4922
%D 1992-04-01
%~ DeepDyve