%0 Journal Article
%T Susceptor assisted microwave annealing for recrystallization and dopant activation of arsenic-implanted silicon
%A Vemuri, Rajitha N. P.
%A Gadre, Mandar J.
%A Theodore, N. D.
%A Chen, W.
%A Lau, S. S.
%A Alford, T. L.
%A ,
%J Journal of Applied Physics
%V 110
%N 3
%P 034907
%@ 0021-8979
%D 2011-08-01
%I AIP Publishing
%~ DeepDyve