%0 Journal Article
%T DMD maskless lithography optimization based on an improved genetic algorithm
%A Huang, Shengzhou
%A Tang, Yuanzhuo
%A Ren, Bowen
%A Wu, Dongjie
%A Pan, Jiani
%A Tian, Zhaowei
%A Jiang, Chengwei
%A Li, Zhi
%A Huang, Jinjin
%J Japanese Journal of Applied Physics
%V 63
%N 4
%P 9
%@ 0021-4922
%D 2024-04-01
%I IOP Publishing
%~ DeepDyve