%0 Journal Article %T A Simple Model for Substrate Current Characteristics in Short-Channel Ultrathin-Film Metal-Oxide-Semiconductor Field-Effect Transistors by Separation by Implanted Oxygen %A Yasuhisa Omura , Yasuhisa Omura %J Japanese Journal of Applied Physics %V 34 %N 9R %@ 0021-4922 %D 1995-09-01 %~ DeepDyve