%0 Journal Article %T Vibroacoustic monitoring of technological processes employing electrophysical phenomena %A Grigoriev, Sergey N. %A Kozochkin, Mikhail P. %A Ershov, Artem A. %A Maung, Thein %A Fedorov, Sergey V. %A Pivkin, Petr M. %J Proceedings of SPIE %V 11756 %P 117561F-117561F-10 %@ 0277-786X %D 2021-04-12 %I SPIE %~ DeepDyve