%0 Journal Article
%T Rapid fabrication of an ordered nano-dot array by the combination of nano-plastic forming and annealing methods
%A Yoshino, Masahiko
%A Ohsawa, Hiroki
%A Yamanaka, Akinori
%J Journal of Micromechanics and Microengineering
%V 21
%N 12
%P 9
%@ 0960-1317
%D 2011-12-01
%~ DeepDyve