%0 Journal Article
%T Integrated microsensors and systems
%A Xia, Shanhong
%A Sun, Jizhou
%A Bian, Chao
%J Proceedings of SPIE
%V 6836
%N 1
%P 68360L-68360L-7
%@ 0277-786X
%D 2007-11-29
%I SPIE
%~ DeepDyve