%0 Journal Article %T Simulation on a deformable mirror actuated by microfluidic elements %A Deng, Chao %A Sun, Wenzhen %J Proceedings of SPIE %V 7284 %N 1 %P 72840H-72840H-6 %@ 0277-786X %D 2009-05-11 %I SPIE %~ DeepDyve