%0 Journal Article
%T TCAD simulation of ion implantation test for controlling quality of GaAs substrates used for fabricating implanted devices
%A Deepak, 
%A Blakey, Peter
%A Johnson, Karl
%J Journal of Electronic Materials
%V 30
%N 2
%P 70-77
%@ 0361-5235
%D 2001-06-22
%I Springer-Verlag
%~ DeepDyve