%0 Journal Article
%T Improvement of Thickness Uniformity of Silicon on Insulator Layer by Numerically Controlled Sacrificial Oxidation Using Atmospheric-Pressure Plasma with Electrode Array System
%A Kamisaka, Shohei
%A Yoshinaga, Keinosuke
%A Sano, Yasuhisa
%A Mimura, Hidekazu
%A Matsuyama, Satoshi
%A Yamauchi, Kazuto
%J Japanese Journal of Applied Physics
%V 49
%N 8S1
%@ 0021-4922
%D 2010-08-01
%~ DeepDyve