%0 Journal Article
%T Experimental validation of a thermal model used to predict the image placement error of a scanned EUVL reticle
%A Gianoulakis, Steven E.
%J Proceedings of SPIE
%V 3997
%N 1
%P 848-854
%@ 0277-786X
%D 2000-07-21
%I SPIE
%~ DeepDyve