%0 Journal Article
%T Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System
%A Geng, Yanquan
%A Wang, Yuzhang
%A Cai, Jianxiong
%A Zhang, Jingran
%A Yan, Yongda
%J Chinese Journal of Mechanical Engineering
%V 35
%N 1
%@ 1000-9345
%D 2022-12-01
%I Springer Nature Singapore
%~ DeepDyve