%0 Journal Article
%T Laser nanolithography and chemical metalization for the manufacturing of 3D metallic interconnects
%A Jonavičius, Tomas
%A Rekštytė, Sima
%A Žukauskas, Albertas
%A Malinauskas, Mangirdas
%J Proceedings of SPIE
%V 8970
%P 89700C-89700C-7
%@ 0277-786X
%D 2014-03-06
%I SPIE
%~ DeepDyve