%0 Journal Article
%T Silicide-based photodetectors with localized surface plasmon resonance for mid-IR detection
%A Syu, Hong-Jhang
%A Lai, Hsin-Han
%A Sun, Ruei-Lien
%A Lin, Ching-Fuh
%J Proceedings of SPIE
%V 11741
%P 117411S-117411S-6
%@ 0277-786X
%D 2021-04-12
%I SPIE
%~ DeepDyve