%0 Journal Article
%T Silicon Wafers; Its Manufacturing Processes and Finishing Techniques: an Overview
%A Pandey, Kheelraj
%A Sharma, Ashwani
%A Singh, Ayush Kumar
%J Silicon
%V 14
%N 18
%P 12031-12047
%@ 1876-990X
%D 2022-12-01
%I Springer Netherlands
%~ DeepDyve