%0 Journal Article
%T Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners
%A Zimmermann, Jörg
%A Geh, Bernd
%A Engelen, Andre
%A Park, Sean
%A De Vocht, Joep
%J Proceedings of SPIE
%V 7640
%N 1
%P 764005-764005-15
%@ 0277-786X
%D 2010-04-09
%I SPIE
%~ DeepDyve