%0 Journal Article
%T Fabrication and characterization of co-planar type MEMS structures on SiO2 /Si 3 N 4 membrane for gas sensors with dispensing method guided by microma ...
%A Kim, Soo-Ho
%A Park, Joon-Shik
%A Lee, In-Gyu
%J Journal of Electroceramics
%V 17
%N 4
%P 995-998
%@ 1385-3449
%D 2006-01-01
%I Kluwer Academic Publishers
%~ DeepDyve