%0 Journal Article
%T A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-к materials
%A Han, Guiquan
%A Liu, Yuhong
%A Lu, Xinchun
%A Luo, Jianbin
%J Nanoscale Research Letters
%V 7
%N 1
%P 1-5
%@ 1931-7573
%D 2012-10-30
%I Springer New York
%~ DeepDyve