%0 Journal Article
%T Deep levels in silicon–oxygen superlattices
%A Simoen, E
%A Jayachandran, S
%A Delabie, A
%A Caymax, M
%A Heyns, M
%J Semiconductor Science and Technology
%V 31
%N 2
%P 8
%@ 0268-1242
%D 2016-02-01
%~ DeepDyve