%0 Journal Article
%T Plasma‐Assisted Atomic Layer Deposition of Al 2 O 3 at Room Temperature
%A Kääriäinen, Tommi O.
%A Cameron, David C.
%J Plasma Processes and Polymers
%V 6
%N S1
%P S237-S241
%@ 1612-8850
%D 2009-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve