%0 Journal Article
%T Towards manufacturing of advanced logic devices by double-patterning
%A Koay, Chiew-seng
%A Halle, Scott
%A Holmes, Steven
%A Petrillo, Karen
%A Colburn, Matthew
%A van Dommelen, Youri
%A Jiang, Aiqin
%A Crouse, Michael
%A Dunn, Shannon
%A Hetzer, David
%A Kawakami, Shinichiro
%A Cantone, Jason
%A Huli, Lior
%A Rodgers, Martin
%A Martinick, Brian
%J Proceedings of SPIE
%V 7973
%N 1
%P 79730F-79730F-18
%@ 0277-786X
%D 2011-03-17
%I SPIE
%~ DeepDyve