%0 Journal Article
%T Optical position feedback and phase control of MOEMS scanner mirrors
%A Tortschanoff, A.
%A Wildenhain, M.
%A Kenda, A.
%J Proceedings of SPIE
%V 7594
%N 1
%P 75940K-75940K-11
%@ 0277-786X
%D 2010-02-16
%I SPIE
%~ DeepDyve