%0 Journal Article
%T Fabrication of out-of-plane SU-8 refractive microlens using direct lithography method
%A Yang, Ren
%J Proceedings of SPIE
%V 5346
%N 1
%P 151-159
%@ 0277-786X
%D 2004-01-24
%I SPIE
%~ DeepDyve