%0 Journal Article
%T Transmission FabryPérot interference thermometry for thermal characterization of microelectronic devices
%A Perpiñà, X
%A Jordà, X
%A Madrid, F
%A Vellvehi, M
%A Millán, J
%A Mestres, N
%J Semiconductor Science and Technology
%V 21
%N 12
%P 6
%@ 0268-1242
%D 2006-12-01
%~ DeepDyve