%0 Journal Article
%T Modeling of Conduction Mechanisms in Ultrathin Films of Al2O3 Deposited by ALD
%A Salas-Rodríguez, Silvestre
%A Molina-Reyes, Joel
%A Martínez-Castillo, Jaime
%A Woo-Garcia, Rosa M.
%A Herrera-May, Agustín L.
%A López-Huerta, Francisco
%J Electronics
%V 12
%N 4
%@ 2079-9292
%D 2023-02-10
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve