%0 Journal Article
%T Fabrication process and characterization of micromechanical sensors based on SU-8 resist
%A Jordan, A.
%A Büttgenbach, S.
%J Proceedings of SPIE
%V 8066
%N 1
%P 80660A-80660A-9
%@ 0277-786X
%D 2011-05-04
%I SPIE
%~ DeepDyve