%0 Journal Article
%T Measurement of Electron Density of Reactive Plasma Using a Plasma Oscillation Method
%A Kanoh, Masaaki
%A Tonotani, Junichi
%A Aoki, Katsuaki
%A Yamage, Masashi
%J Japanese Journal of Applied Physics
%V 41
%N 6R
%@ 0021-4922
%D 2002-06-01
%~ DeepDyve