%0 Journal Article
%T Impact of proximity model inaccuracy on patterning in electron beam lithography
%A Chen, Cheng-Hung
%A Chien, Tsung-Chih
%A Liu, P. Y.
%A Wang, W. C.
%A Shin, J. J.
%A Lin, S. J.
%A Lin, Burn J.
%J Proceedings of SPIE
%V 8880
%P 888014-888014-7
%@ 0277-786X
%D 2013-09-09
%I SPIE
%~ DeepDyve