%0 Journal Article
%T Comprehensive design and process flow configuration for micro and nano tech devices
%A Hahn, Kai
%A Ortloff, Dirk
%A Brück, Rainer
%J Proceedings of SPIE
%V 7646
%N 1
%P 76461F-76461F-11
%@ 0277-786X
%D 2010-04-22
%I SPIE
%~ DeepDyve