%0 Journal Article
%T Study on diazonaphthoquinone positive photoresist composition for LCD
%A Zhou, Fangyu
%J Proceedings of SPIE
%V 6519
%N 1
%P 65194C-65194C-9
%@ 0277-786X
%D 2007-03-16
%I SPIE
%~ DeepDyve