%0 Journal Article %T Method of choice for the fabrication of high-quality β-gallium oxide-based Schottky diodes %A Müller, Stefan %A Wenckstern, Holger von %A Schmidt, Florian %A Splith, Daniel %A Frenzel, Heiko %A Grundmann, Marius %J Semiconductor Science and Technology %V 32 %N 6 %P 8 %@ 0268-1242 %D 2017-06-01 %~ DeepDyve