%0 Journal Article
%T Novel functional nortricyclene polymers and copolymers for 248- and 193-nm chemically amplified resists
%A Niu, Qingshang J.
%A Okoroanyanwu, Uzodinma
%J Proceedings of SPIE
%V 3049
%N 1
%P 113-123
%@ 0277-786X
%D 1997-07-07
%I SPIE
%~ DeepDyve