%0 Journal Article %T Uncooled IRFPA with chip scale vacuum package %A Hata, Hisatoshi %A Kimata, Masafumi %J Proceedings of SPIE %V 6206 %N 1 %P 620619-620619-10 %@ 0277-786X %D 2006-05-05 %I SPIE %~ DeepDyve