%0 Journal Article
%T In device overlay control with multiple overlay metrology in 3D-NAND process
%A Chang, Li-Ting
%A Liu, Yu-Lin
%A Huang, Chi-hao
%A Kushwaha, Rishabh
%A Chuan Sun, Yen Chun
%A Wu, Cheng Hung
%A Cheng, Shao Chang
%A Su, Hsiao Fei
%A Liu, Yen Hung
%A Yang, Mars
%A Yang, Elvis
%A Yang, T. H.
%A Chen, K. C.
%J Proceedings of SPIE
%V 12053
%P 120531P-120531P-9
%@ 0277-786X
%D 2022-05-26
%I SPIE
%~ DeepDyve