%0 Journal Article %T An ultrahigh-voltage 4H-SiC merged PiN Schottky diode with three-dimensional p-type buried layers %A Yang, Shuai %A Zhang, Xiao-dong %A Cao, An %A Luo, Wen-yu %A Zhang, Guang-lei %A Peng, Bo %A Zhao, Jin-jin %J Journal of Central South University %V 28 %N 12 %P 3694-3704 %@ 1005-9784 %D 2021-12-01 %I Central South University %~ DeepDyve