%0 Journal Article %T Performance improvement of the EEPROM cells with the standard logic process featuring a metal finger coupling capacitor %A Tang, Poren %A Huang, Ru %A Wu, Dake %A Kuang, Yongbian %A Wang, Yangyuan %J Semiconductor Science and Technology %V 25 %N 12 %P 4 %@ 0268-1242 %D 2010-12-10 %~ DeepDyve