%0 Journal Article
%T Cel Resist Processing For Submicron CMOS And Bipolar Circuits
%A Petrillo, K. E.
%A Smyth, M. J.
%A Hall, D. R.
%J Proceedings of SPIE
%V 92
%P 82-90
%@ 0277-786X
%D 1988-01-01
%I SPIE
%~ DeepDyve