%0 Journal Article
%T Three-Dimensional Nanofabrication with 10-nm Resolution
%A Yamazaki, Kenji
%A Yamaguchi, Toru
%A Namatsu, Hideo
%J Japanese Journal of Applied Physics
%V 43
%N 8B
%@ 0021-4922
%D 2004-08-01
%~ DeepDyve