%0 Journal Article
%T Thermally‐reacted poly(methacrylamide) as a positive electron beam resist
%A Matsuda, S.
%A Tsuchiya, S.
%A Honma, M.
%A Hasegawa, K.
%A Nagamatsu, G.
%A Asano, T.
%J Polymer Engineering & Science
%V 17
%N 6
%P 410-413
%@ 0032-3888
%D 1977-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve