%0 Journal Article
%T The application of dry photoresists in fabricating cost-effective tapered through-silicon vias and redistribution lines in a single step
%A Dixit, Pradeep
%A Salonen, Jaakko
%A Pohjonen, Harri
%A Monnoyer, Philippe
%J Journal of Micromechanics and Microengineering
%V 21
%N 2
%P 11
%@ 0960-1317
%D 2011-02-01
%~ DeepDyve