%0 Journal Article
%T Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
%A Sysoev, E.
%A Kulikov, R.
%A Vykhristyuk, I.
%A Chugui, Yu.
%J Measurement Science Review
%V 15
%N 1
%@ 1335-8871
%D 2015-02-01
%I Walter de Gruyter
%~ DeepDyve