%0 Journal Article %T Metal-oxide-semiconductor Characteristics of Tantalum Oxide Thin Films Grown by 172 nm Radiation %A Zhang, Jun-Ying %A Boyd, I. %J Journal of Materials Science Letters %V 17 %N 17 %P 1507-1509 %@ 0261-8028 %D 2004-09-28 %I Kluwer Academic Publishers %~ DeepDyve