%0 Journal Article
%T Optimization of a Shallow Trench Isolation Process for Improved Planarization
%A Cooperman, S. S.
%A Nasr, A. I.
%A Grula, G. J.
%J Journal of the Electrochemical Society
%V 142
%N 9
%P 3180-3185
%@ 0013-4651
%D 1995-09-01
%~ DeepDyve