%0 Journal Article
%T Effect of Ultraviolet Irradiation on Silicon Oxide Films Prepared by Radio Frequency Plasma‐Enhanced Chemical Vapor Deposition
%A Hozumi, Atsushi
%A Sekoguchi, Hiroki
%A Takai, Osamu
%J Journal of the Electrochemical Society
%V 144
%N 8
%P 2824-2828
%@ 0013-4651
%D 1997-08-01
%~ DeepDyve