%0 Journal Article
%T Characterization of a Newly Designed Vacuum Valve Having a Variable Conductance Function
%A Song, Han Wook
%A Woo, Sam Yong
%J MAPAN
%V 35
%N 3
%P 309-315
%@ 0970-3950
%D 2020-09-26
%I Springer India
%~ DeepDyve